Offer 114 out of 214 from 14/09/23, 15:16


Fraun­ho­fer-Insti­tut für Pho­to­ni­sche Mikro­sys­teme IPMS

The Fraunhofer Institute for Photonic Microsystems is one of 76 institutes of the Fraunhofer-Gesellschaft, one of the leading organizations for applied research in Europe.

Final Thesis on the topic: particle wafer interactions in BEOL manufacturing process


Developing innovative technology solutions and bringing them to application - that is our goal at the Fraunhofer Institute for Photonic Microsystems IPMS. With our expertise in the development of photonic microsystems, related technologies including nanoelectronics and wireless communication solutions, we create - in flexible and interdisciplinary teams - technologies for innovative products in a wide range of markets such as automotive, industrial and aerospace.

The High Performance Technology area, in which the position is located, is responsible for the fields of back-end-of-line metallization and packaging as well as the enablement of CMOS near quantum technologies. Current developments focus on process modules for spin qubits, superconduction qubits as well as system assemblies. During your thesis you will investigate the interaction between organic particles and different ILD materials after Cu-CMP.

Working field:

After the chemical mechanical polishing (CMP) of copper interconnect on 300mm wafers, organic residues are critical for the process yield. To enable a dedicated particle removal approach, the surface properties as well as the interaction between particles and wafer surface need to be understood.

For this investigation wafers coated with different dielectric materials will be processed by CMP. Lab studies by different surface analysis techniques will be performed e. g. surface potential measurement, cp-AFM, XPS, etc.

These tasks can be worked on as part of a bachelor, master or diploma thesis.


  • Studies in the field of Physics, Chemistry, Material Science or a related field
  • A strong interest in surface and interfacial science and independent laboratory work
  • You can score with a lot of commitment, organizational and communicational skills and team spirit
  • Very good English skills complete your profile

What we offer:

The weekly working time is 39 hours. This position is also available on a part-time basis. We value and promote the diversity of our employees' skills and therefore welcome all applications - regardless of age, gender, nationality, ethnic and social origin, religion, ideology, disability, sexual orientation and identity. Severely disabled persons are given preference in the event of equal suitability.

With its focus on developing key technologies that are vital for the future and enabling the commercial utilization of this work by business and industry, Fraunhofer plays a central role in the innovation process. As a pioneer and catalyst for groundbreaking developments and scientific excellence, Fraunhofer helps shape society now and in the future.

Interested? Apply online now with your significant application documents, transcript of records and enrollment certificate . We look forward to getting to know you!


Mrs. Sabrina Weimert
Human Resources
Phone: +49 (0)351 8823 415

Mrs. Haosheng Wu
Specialty Department
Phone: +49 (0)351 2607 3244